Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer
نویسندگان
چکیده
منابع مشابه
Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer
This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2016
ISSN: 1424-8220
DOI: 10.3390/s16050634